Product Feature

• Intelligent Process Control

  Integrated intelligent control system enables precise programming and coordinated control of temperature, vacuum level, and transfer cycle time, supporting recipe storage and recall, ensuring high process repeatability.

• Rapid and Uniform Infrared Heating

  Adopts infrared radiation heating for rapid and uniform temperature rise. Chamber temperature uniformity reaches ±2℃ to ±5℃, ensuring consistent film crystallization quality.

• High Vacuum Clean Environment

  The core process chamber can operate under high vacuum of <10Pa, effectively isolating water and oxygen, providing an oxidation-free heat treatment environment for sensitive materials such as perovskites.

• Four-Chamber Continuous Design

  Integrates preheating, infrared heating, constant temperature, and four buffer chambers, supporting continuous production with a 90-second cycle time (customizable), designed for GW-level mass production.

• High Sealing and Stable Pressure Holding

  Excellent chamber sealing performance, with a pressure rise of <10Pa after 1 minute of pump stoppage, ensuring long-term stability and reliability of the process environment.

• Safe and Clean Integration

  The entire machine is sealed, with a built-in air inlet and exhaust system, ensuring safe equipment operation and cleanliness requirements for the process area.